Damage-Free Atomic Layer Etch of WSe<sub>2</sub>: A Platform for Fabricating Clean Two-Dimensional Devices
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| Description | scientific article published on 22 December 2020 |
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author: James C. Hone Vinod Menon Ankur Nipane Min Sup Choi Won Jong Yoo Peter James Schuck |
| Publication date | December 22, 2020 |
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