Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
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| Description | scientific article published on 10 December 2020 |
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author: Min-Kyu Joo Hyunjin Ji Jae Woo Lee Yongwoo Lee So Jeong Park Gyu-Tae Kim Daeyoung Jeon Sung-Jin Choi |
| Publication date | December 10, 2020 |
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