A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films
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| Description | scientific article published on 16 October 2020 |
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author: Thomas Riedl Detlef Rogalla Nils Boysen Jan-Lucas Wree Niklas Huster Arbresha Muriqi Michael Nolan |
| Publication date | October 16, 2020 |
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